CVD Crucible furnace evaporation system

Model：KJ-T1600-CVD

Description：

The KJ-T1600-CVD crucible furnace evaporation system forms a dense HfCl4、TiCl4 etc coating on the surface of the target material. It consists of an evaporator, a mixer and a reactor.

Model:KJ-T1600-CVD

1.Tube Furnace Part:
Technical Parameter:

Tube Furnace
Max. Temperature		1600℃
Tube Size		Φ100mm
Heat zone length		300mm
Heating element		MoSi2 rods
Thermo couple		B Type
Display		LED
Tube material		Alumina
Chamber material		Ceramic fiber
Furnace shell material		Carbon steel
Temperature Control		PID automatic control via SCR power control
Heating Rate		0~20℃/max.(Suggest 0-10℃/min)
Temperature control accuracy		±1℃
Temperature uniformity		±5℃
Max. Power		4.0KW
Heating curves		30 steps programmable
Working Voltage		220V, 50HZ (or 380V)
Vacuum Flange		Water cooling flange with valve
flowmeter part
Five flowmeters	FFC 1+MFC 1: H2 Gas flow range from 0~500 sccm FFC 2+MFC 2: CH4 Gas flow range from 0~100 sccm FFC 3+MFC 3: Ar1: Gas flow range from 0~700 sccm FFC 4+MFC 4: Ar2: Gas flow range from 0~700 sccm FFC 5+MFC 5: Gasification gas：Gas flow range from 0~700 sccm ( Gas flow range according to your requirement)

2.Gas mixer part:
Technical Parameter :

Display	LED
Max. Temperature	1200℃ for short time
Continuous Working Temp.	≤1100℃
Heating Rate	Suggestion 0~10℃/min(max. 20℃/min)
Tube material	310S
Temperature heating zone	About 200mm(According to design)
Diameter	About OD165mm(According to design)
Temperature Control Accuracy	±1℃
Heating Element	Resistance wire
Thermocouple	K Type
Max. Power	2.0 KW
Working Voltage	220V, 50HZ (or according to your requirement)
Temperature Control	PID automatic control via SCR power control
Heating curves	30 steps programmable
Chamber material	Alumina Fiber

3.Gasification gas part

Technical Parameter :

Max Temperature	1200℃
Crucible diameter	250mm
Crucible depth	400mm
Heating element	Resistance wire
Thermo couple	K Type
Chamber material	Ceramic fiber
Furnace shell material	Carbon steel
Crucible material	Stainless steel 310S
Temperature Control	PID automatic control
Heating Rate	Max. 0~20℃/min
Temperature control accuracy	±1℃
Max. Power	4.5KW
Working Voltage	220V, 50HZ (or 380V) According to your requirement