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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
Technical Parameter:
| Model:KJ-T1600-CVD | |||
| 1.Tube Furnace Part | |||
| Max. Temperature | 1600℃ | ||
| Tube Size | Φ100mm Can be customized according to customer needs |
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| Heat zone length | 300mm | ||
| Heating element | MoSi2 rods | ||
| Thermo couple | B Type | ||
| Display | LED | ||
| Tube material | Alumina | ||
| Chamber material | Ceramic fiber | ||
| Furnace shell material | Carbon steel | ||
| Temperature Control | PID automatic control via SCR power control | ||
| Heating Rate | 0~20℃/max.(Suggest 0-10℃/min) | ||
| Temperature control accuracy | ±1℃ | ||
| Temperature uniformity | ±5℃ | ||
| Heating curves | 30 steps programmable | ||
| Vacuum Flange | Water cooling flange with valve | ||
| flowmeter part | |||
| Five flowmeters | FFC 1+MFC 1: H2 Gas flow range from 0~500 sccm FFC 2+MFC 2: CH4 Gas flow range from 0~100 sccm FFC 3+MFC 3: Ar1: Gas flow range from 0~700 sccm FFC 4+MFC 4: Ar2: Gas flow range from 0~700 sccm FFC 5+MFC 5: Gasification gas：Gas flow range from 0~700 sccm ( Gas flow range according to your requirement) |
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| 2.Gas mixer part | |
| Display | LED |
| Max. Temperature | 1200℃ for short time |
| Continuous Working Temp. | ≤1100℃ |
| Heating Rate | Suggestion 0~10℃/min(max. 20℃/min) |
| Tube material | 310S |
| Temperature heating zone | About 200mm (According to design) |
| Diameter | About OD165mm (According to design) |
| Temperature Control Accuracy | ±1℃ |
| Heating Element | Resistance wire |
| Thermocouple | N Type |
| Temperature Control | PID automatic control via SCR power control |
| Heating curves | 30 steps programmable |
| Chamber material | Alumina Fiber |
| 3.Gasification gas part | |
| Max Temperature | 1200℃ |
| Crucible diameter | 250mm |
| Crucible depth | 400mm |
| Heating element | Resistance wire |
| Thermo couple | N Type |
| Chamber material | Ceramic fiber |
| Furnace shell material | Carbon steel |
| Crucible material | Stainless steel 310S |
| Temperature Control | PID automatic control |
| Heating Rate | Max. 0~20℃/min |
| Temperature control accuracy | ±1℃ |
